SEMICONDUCTOR WAFER ISOLATED TRANSFER CHUCK

摘要

A semiconductor wafer processing tool has a support structure (12) for a coarse motion positioning system (14). A measurement head (26) having a rigid super structure (28) is supported from the support structure by vibration isolators (30a, 30b) and a top plate (32) is mounted to the super structure. A vacuum transfer chuck (24) is releasably carried by the coarse motion positioning system and releasably adherable to the top plate by application of vacuum. The vacuum transfer chuck supports a semiconductor wafer (42).