发明名称 SEMICONDUCTOR COMPONENT WITH VERTICAL STRUCTURES HAVING A HIGH ASPECT RATIO AND METHOD
摘要 A semiconductor component with vertical structures having a high aspect ratio and method. In one embodiment, a drift zone is arranged between a first and a second component zone. A drift control zone is arranged adjacent to the drift zone in a first direction. A dielectric layer is arranged between the drift zone and the drift control zone wherein the drift zone has a varying doping and/or a varying material composition at least in sections proceeding from the dielectric.
申请公布号 US2013330908(A1) 申请公布日期 2013.12.12
申请号 US201313966915 申请日期 2013.08.14
申请人 INFINEON TECHNOLOGIES AG 发明人 MAUDER ANTON;STRACK HELMUT;WILLMEROTH ARMIN;SCHULZE HANS-JOACHIM
分类号 H01L21/762 主分类号 H01L21/762
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