发明名称 |
Method for electroless deposition of a copper layer, electroless deposited copper layer and semiconductor component comprising said electroless deposited copper layer |
摘要 |
The invention is directed to method for electroless deposition of a copper-layer on a semiconductor substrate, an electroless deposited copper layer as well as a semiconductor component comprising said electroless deposited copper layer. |
申请公布号 |
EP2672520(A1) |
申请公布日期 |
2013.12.11 |
申请号 |
EP20120171065 |
申请日期 |
2012.06.06 |
申请人 |
SEMIKRON ELEKTRONIK GMBH & CO. KG |
发明人 |
SOARES CEASAR DA SILVA FRANCO, CIBELE |
分类号 |
H01L31/0224 |
主分类号 |
H01L31/0224 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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