发明名称 Method for electroless deposition of a copper layer, electroless deposited copper layer and semiconductor component comprising said electroless deposited copper layer
摘要 The invention is directed to method for electroless deposition of a copper-layer on a semiconductor substrate, an electroless deposited copper layer as well as a semiconductor component comprising said electroless deposited copper layer.
申请公布号 EP2672520(A1) 申请公布日期 2013.12.11
申请号 EP20120171065 申请日期 2012.06.06
申请人 SEMIKRON ELEKTRONIK GMBH & CO. KG 发明人 SOARES CEASAR DA SILVA FRANCO, CIBELE
分类号 H01L31/0224 主分类号 H01L31/0224
代理机构 代理人
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