发明名称 Blocking member for use in the diffraction plane of a TEM
摘要 The invention relates to a blocking member to be placed in the diffraction plane of a TEM. It resembles the knife edge used for single sideband imaging, but blocks only electrons deflected over a small angle. As a result the Contrast Transfer Function of the TEM according to this invention will equal that of a single sideband microscope at low frequencies and that of a normal microscope for high frequencies. Preferable the highest frequency blocked by the blocking member is such that a microscope without the blocking member would show a CTF of 0.5.
申请公布号 EP2400523(B1) 申请公布日期 2013.12.11
申请号 EP20110171115 申请日期 2011.06.23
申请人 FEI COMPANY 发明人 TIEMEIJER, PETER;BUIJSSE, BART
分类号 H01J37/09;H01J37/26 主分类号 H01J37/09
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