发明名称 |
Blocking member for use in the diffraction plane of a TEM |
摘要 |
The invention relates to a blocking member to be placed in the diffraction plane of a TEM. It resembles the knife edge used for single sideband imaging, but blocks only electrons deflected over a small angle. As a result the Contrast Transfer Function of the TEM according to this invention will equal that of a single sideband microscope at low frequencies and that of a normal microscope for high frequencies. Preferable the highest frequency blocked by the blocking member is such that a microscope without the blocking member would show a CTF of 0.5. |
申请公布号 |
EP2400523(B1) |
申请公布日期 |
2013.12.11 |
申请号 |
EP20110171115 |
申请日期 |
2011.06.23 |
申请人 |
FEI COMPANY |
发明人 |
TIEMEIJER, PETER;BUIJSSE, BART |
分类号 |
H01J37/09;H01J37/26 |
主分类号 |
H01J37/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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