发明名称 METHOD FOR PULLING A SINGLE CRYSTAL COMPOSED OF SILICON WITH A SECTION HAVING A DIAMETER THAT REMAINS CONSTANT
摘要 <p>Single crystal composed of silicon with a section having a diameter that remains constant, are pulled by a method wherein the single crystal is pulled with a predefined pulling rate vp having the units [mm/min]; and the diameter of the single crystal in the section having a diameter that remains constant is regulated to the predefined diameter by regulating the heating power of a first heating source which supplies heat to the single crystal and to a region of the melt that adjoins the single crystal and is arranged above the melt, such that diameter fluctuations are corrected with a period duration T that is not longer than (2·18 mm)/vp.</p>
申请公布号 KR101340804(B1) 申请公布日期 2013.12.11
申请号 KR20100100999 申请日期 2010.10.15
申请人 发明人
分类号 C30B15/20;C30B29/06;H01L21/02 主分类号 C30B15/20
代理机构 代理人
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