| 摘要 |
The present invention provides a method and a system for rapid mixing of process chemicals. The method for rapid mixing of process chemicals includes injecting a first process chemical in or around the center of a flowing direction to make uniform the mixture of a target mixing distance and a target mixing time and a second process in the flowing of the first process chemical and the same flowing direction. The system for rapid mixing of process chemicals includes a first process chemical supply line with uniform mixing of the target mixing distance and the target mixing time, a second process chemical supply line, and at least one nozzle. |
