NANO STRUCTURED COMPOSITE THIN FILM, METHODS FOR FORMING THE SAME, MEMBERS WITH LOW FRICTION AND METHOD FOR FORMING THE SAME

摘要

The subject of the present invention is to provide a nanostructured composite thin film with low friction properties, a method for manufacturing the same, a member with low friction, and a method for manufacturing the same, wherein the thin film shows low friction coefficient, high hardness, and high adhesion in comparison with a known thin film and the member with low friction is formed with a nanostructured composite thin film on the surface thereof. According to one viewpoint of the present invention, provided is a nanostructured composite thin film with low friction properties which has a composite structure in which a nitride phase including Zr and Al as a nitride component and at least one metallic phase are mixed and the size of crystal grains is 5-30nm. The nitride phase has the crystalline structure of a Zr nitride. The metallic phase may include one or more selected from Cu or Ni. [Reference numerals] (AA) Target 5;(BB) Target 1;(CC) Target 32;(DD) Target 31;(EE) Target 34;(FF) Target 19;(GG) Target 15;(HH) Target 23;(II) Target 16