MICROMECHANICAL STRUCTURE AND METHOD FOR SETTING THE WORKING GAP WIDTH OF A MICROMECHANICAL STRUCTURE

摘要

A micromechanical structure, includes at least two structure sections configured to bound a working gap, the at least two structure sections being movable relative to one another, and a working gap width setting device configured to broaden the at least one working gap by movement of a first structure section of the at least two structure sections relative to a second structure section of the at least two structure section, the first structure section is stationary relative to a reference point during operation of the micromechanical structure and (ii) the second structure section is movable relative to the reference point during operation.