发明名称 |
METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD |
摘要 |
<p>A method for manufacturing a minute structure comprises a step of forming an ionizing radiation decomposing type positive type resist layer including a methyl isopropenyl ketone as a first positive type photosensitive material layer, a step of forming an ionizing radiation decomposing type positive type resist layer including a photosensitive material of a copolymer as a second positive type photosensitive material layer to be sensitized by an ionizing radiation of a second wavelength range on the first positive type photosensitive material layer, a step of forming a desired pattern in the above-mentioned second positive type photosensitive material layer, and development using a developing solution, and then, a step of forming a desired pattern in the above-mentioned first positive type photosensitive material layer to form a convex shape pattern.</p> |
申请公布号 |
EP1763706(B1) |
申请公布日期 |
2013.12.11 |
申请号 |
EP20050755401 |
申请日期 |
2005.06.27 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KUBOTA, MASAHIKO;SUZUKI, TAKUMI;SATO, TAMAKI;KANRI, RYOJI;HATTA, MAKI;ASAI, KAZUHIRO;SHIBA, SHOJI;ISHIKURA, HIROE;OKANO, AKIHIKO |
分类号 |
G03F7/095;B41J2/14;B41J2/16 |
主分类号 |
G03F7/095 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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