发明名称 VISION INSPECTION MODULE, AND DEVICE INSPECTION APPARATUS HAVING THE SAMEM, AND VISION INSPECTION METHOD
摘要 The present invention relates to an element testing device which includes a vision testing module which tests the surface of an element, an element testing device having the same; and a vision testing method. The present invention is designed for achieving the described purpose of the invention. The present invention includes a light source unit which successively radiates some of measurement lights having different optical properties to a test object; and a vision testing module which includes an image acquisition unit which acquires images of the test object irradiated with the measurement lights.
申请公布号 KR20130135582(A) 申请公布日期 2013.12.11
申请号 KR20120059285 申请日期 2012.06.01
申请人 JT CORPORATION 发明人 YOU, HONG JUN;LEE, SANG HOON;KIM, KYOUNG HO
分类号 G01N21/88;H01L21/66 主分类号 G01N21/88
代理机构 代理人
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