发明名称 |
VISION INSPECTION MODULE, AND DEVICE INSPECTION APPARATUS HAVING THE SAMEM, AND VISION INSPECTION METHOD |
摘要 |
The present invention relates to an element testing device which includes a vision testing module which tests the surface of an element, an element testing device having the same; and a vision testing method. The present invention is designed for achieving the described purpose of the invention. The present invention includes a light source unit which successively radiates some of measurement lights having different optical properties to a test object; and a vision testing module which includes an image acquisition unit which acquires images of the test object irradiated with the measurement lights. |
申请公布号 |
KR20130135582(A) |
申请公布日期 |
2013.12.11 |
申请号 |
KR20120059285 |
申请日期 |
2012.06.01 |
申请人 |
JT CORPORATION |
发明人 |
YOU, HONG JUN;LEE, SANG HOON;KIM, KYOUNG HO |
分类号 |
G01N21/88;H01L21/66 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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