Amorphous carbon and aluminum x-ray window

摘要

An x-ray window including at least one aluminum layer ((21a), (21b)) and at least one amorphous carbon layer (23). At least one polymer layer (22) may also be included. Aluminum layer(s) can provide improved gas impermeability to the window. Amorphous carbon layer(s) can provide corrosion resistance. Polymer layer(s) can provide improved structural strength.