发明名称 METHOD FOR MANUFACTURING TWO SUBSTRATES CONNECTED BY AT LEAST ONE MECHANICAL AND ELECTRICALLY CONDUCTIVE CONNECTION AND THE STRUCTURE OBTAINED
摘要 A first substrate provided with a receiving area made from a first metallic material is supplied. A second substrate provided with an insertion area comprising a base surface and at least two bumps made from a second metallic material is arranged facing the first substrate. The bumps are salient from the base surface. A pressure is applied between the first substrate and the second substrate so as to make the bumps penetrate into the receiving area. The first metallic material reacts with the second metallic material so as to form a continuous layer of an intermetallic compound having a base formed by the first and second metallic materials along the interface between the bumps and the receiving area.
申请公布号 EP2671250(A1) 申请公布日期 2013.12.11
申请号 EP20120708562 申请日期 2012.01.31
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 SOURIAU, JEAN-CHARLES
分类号 H01L21/60;H01L21/56;H01L23/485;H01L25/065 主分类号 H01L21/60
代理机构 代理人
主权项
地址