VISION INSPECTION MODULE AND DEVICE INSPECTION APPARATUS HAVING THE SAME

摘要

The present invention relates to an element testing device and, more specifically, to a vision testing module which tests the surface of an element and an element testing device having the same. Disclosed is the vision testing module which includes a light source unit emitting lights on an object; at least two image acquisition units which acquire images of a testing object irradiated with the lights of the light source unit; a light splitting unit which splits a phase of the testing object corresponding to the number of the image acquisition unit to make each image acquisition unit acquire the images of the testing object; and a focus control unit which is installed on an optical passage between the light splitting unit and at least one of the image acquisition units and which controls a focus of the corresponding image acquisition unit.