| 摘要 |
The present invention provides a coating device capable of preventing damage to the slit nozzle of a mouthpiece even when an object of collision deviates from a guard member. The coating device according to the present invention comprises a stage having a substrate mounted thereon; a coating unit for forming a coating film on the substrate by discharging coating liquid from the slit nozzle while relatively moving with respect to the substrate mounted on the stage; and a guard unit installed ahead of the slit nozzle in the proceeding direction of coating and protecting the slit nozzle from the object of collision, wherein the guard unit has a plurality of guard members having a size larger than the size in the longer direction of the slit nozzle and has a shape resembling the slit nozzle; and a capture and storage part is installed between the fore-end guard member placed foremost in the proceeding direction of coating and rear guard members placed behind the fore-end guard member in the proceeding direction of coating. |
