MICRO AEROSOL PARTICLE CHARGER MEMS BASED USING SLIT DIELECTRIC BARRIER AND METHOD OF MANUFACTURING THE SAME

摘要

The present invention relates to a particle charger using corona discharge. More particularly, the present invention relates to a micro aerosol particle charger MEMS based using a slit dielectric barrier capable of increasing particle charges through a second discharging generated in the surface of a slit dielectric barrier after the particles are charged by a tip-plate type electrode and A method for manufacturing the same.