| 摘要 |
An image correlation displacement sensor is provided for measuring yaw rotation relative to a target surface using a simple configuration compatible with a fast measurement sample rate. The image correlation displacement sensor may include: an illumination portion (130) which emits illumination light to the target surface to produce a speckle field; an imaging portion (240) which captures a plurality of images including the speckle fields produced on the target surface; and a processing portion (200) which measures a displacement including a rotation about a yaw axis of the target surface in accordance with first and second region translational displacements determined based on the plurality of images captured along the first optical path and the second optical path, and a known separation between the first and second regions. |
