| 摘要 |
The resonance frequency of a forced torsionally oscillating mirror MEMS device can be controlled in the presence of perturbations by means of a closed loop feedback device and method of using it. The method is implemented through a simple algorithm, implemented in either software or hardware, that maintains the condition of resonance, or another selected frequency, by recursively determining that the center of the driving voltage pulse is positioned at a point on the measured positional waveform of the oscillating system. |
