发明名称 Electrical devices containing a carbon nanotube switching layer with a passivation layer disposed thereon and methods for production thereof
摘要 Electrical devices containing carbon nanotubes can be passivated to protect the carbon nanotubes from degradation while substantially preserving the carbon nanotubes' electrical conductivity and switching characteristics. Such electrical devices can include a first metal contact, a switching layer containing a plurality of carbon nanotubes disposed on the first metal contact, a passivation layer containing amorphous carbon, a metal carbide, or any combination thereof that is disposed on at least a top surface of the switching layer, and a second metal contact disposed upon the passivation layer. Methods for forming the electrical devices can include disposing a passivation layer containing amorphous carbon on at least a top surface of the switching layer, and optionally heating to at least partially convert the amorphous carbon within the passivation layer into a metal carbide.
申请公布号 US8604459(B1) 申请公布日期 2013.12.10
申请号 US201213491550 申请日期 2012.06.07
申请人 WARD JONATHAN W.;DERDERIAN GARO J.;LOCKHEED MARTIN CORPORATION 发明人 WARD JONATHAN W.;DERDERIAN GARO J.
分类号 H01L29/06 主分类号 H01L29/06
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