发明名称 Stressed source/drain CMOS and method for forming same
摘要 A complementary metal-oxide semiconductor (CMOS) structure includes a substrate and a P-type field effect transistor (FET) and an N-type FET disposed adjacent to one another on the substrate. Each FET includes a silicon-on-insulator (SOI) region, a gate electrode disposed on the SOI region, a source stressor, and a drain stressor disposed across from the source stressor relative to the gate electrode, wherein proximities of the source stressor and the drain stressor to a channel of a respective FET are substantially equal.
申请公布号 US8603894(B2) 申请公布日期 2013.12.10
申请号 US201213423716 申请日期 2012.03.19
申请人 MAJUMDAR AMLAN;WANG XINHUI;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 MAJUMDAR AMLAN;WANG XINHUI
分类号 H01L21/76 主分类号 H01L21/76
代理机构 代理人
主权项
地址