Graphene nano-ribbon, method of fabricating the graphene nano-ribbon, and electronic device using the graphene nano-ribbon

摘要

PURPOSE: A graphene nano ribbon, a manufacturing method thereof and a manufacturing method of electric components using the same are provided to be advantageous for integration of a device and to manufacture the graphene-nano ribbon to have desired size energy band gap by easily adjusting width of the graphene-nano ribbon. CONSTITUTION: A manufacturing method of graphene-nano ribbon comprises the following steps: mesa etching the top surface of a substrate (11) to form a plurality of grooves and protrusion parts (12); forming a graphene oxide thin film layer on the top surface of the substrate which has the plurality of grooves and protrusion parts; etching the graphene oxide thin film layer using a reactive ion etching (RIE) method by tilting the substrate; and forming graphene nano ribbons (15) by reducing the graphene oxide thin film layer remaining on the sidewall of the protrusion parts in the grooves.