发明名称 |
Method of processing a contact pad |
摘要 |
In various embodiments, a method of processing a contact pad may include providing a contact pad, a topmost layer of the contact pad containing aluminum or an aluminum alloy, at least part of the topmost layer of the contact pad being exposed; subjecting the contact pad to a thermally activated atmosphere containing water or reactive components of water. |
申请公布号 |
US8603910(B2) |
申请公布日期 |
2013.12.10 |
申请号 |
US201213349682 |
申请日期 |
2012.01.13 |
申请人 |
KOITZ MARCO;ZIEGER GUENTER;KRENN CHRISTIAN;KLEINBICHLER FRANZ;ZOTH GUENTHER;MAYER KARL;INFINEON TECHNOLOGIES AG |
发明人 |
KOITZ MARCO;ZIEGER GUENTER;KRENN CHRISTIAN;KLEINBICHLER FRANZ;ZOTH GUENTHER;MAYER KARL |
分类号 |
H01L21/44 |
主分类号 |
H01L21/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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