MICROPHONES INTEGRATED WITH CMOS CIRCUITS AND FABRICATION METHOD THEREOF

摘要

A microphone integrated with CMOS circuits which are reduced in size using a simple process and a fabrication method thereof are proposed. The proposed microphone is a microphone integrated with CMOS circuits with a sound sensor including silicon nanowires and a CMOS signal processing circuit arranged on a silicon substrate in an integrated manner. [Reference numerals] (111) Silicon nano wire;(112) Silicon nitride layer;(120) CMOS signal processing circuit;(130) Silicone substrate