发明名称 Composition for removing a photoresist and method of manufacturing a thin-film transistor substrate using the composition
摘要 A composition for removing a photoresist, the composition including about 1% by weight to about 10% by weight of tetramethyl ammonium hydroxide ("TMAH"), about 1% by weight to about 10% by weight of an alkanol amine, about 50% by weight to about 70% by weight of a glycol ether compound, about 0.01% by weight to about 1% by weight of a triazole compound, about 20% by weight to about 40% by weight of a polar solvent, and water, each based on a total weight of the composition.
申请公布号 US8603867(B2) 申请公布日期 2013.12.10
申请号 US201213439418 申请日期 2012.04.04
申请人 KIM BONG-KYUN;CHOI SHIN-IL;PARK HONG-SICK;LEE WANG-WOO;JANG SEOK-JUN;KIM BYUNG-UK;PARK SUN-JOO;YOON SUK-IL;JEONG JONG-HYUN;HUR SOON-BEOM;SAMSUNG DISPLAY CO., LTD. 发明人 KIM BONG-KYUN;CHOI SHIN-IL;PARK HONG-SICK;LEE WANG-WOO;JANG SEOK-JUN;KIM BYUNG-UK;PARK SUN-JOO;YOON SUK-IL;JEONG JONG-HYUN;HUR SOON-BEOM
分类号 H01L21/312 主分类号 H01L21/312
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