LIGHT EXPOSURE APPARATUS COMPRISING POLARIZING BEAM SPLITTER

摘要

The present invention relates to a light exposure apparatus comprising a polarizing beam splitter, more specifically, to a light exposure apparatus which includes a polarized beam splitter which separates incident non-polarized light into two kinds of polarized lights and a reflector which allows one polarized light separated by the polarized beam splitter to move in parallel with the other polarized light and simplifies the manufacturing process and reduces the processing time by simultaneously forming various patterns by radiating two kinds of polarized lights to the different regions of a substrate. [Reference numerals] (AA) Light source