| 摘要 |
The present invention relates to an application reconfiguration terminal comprising a user interface unit, a control unit, an application request unit, and an application receiving unit. The user interface unit receives an application reconfiguration command which combines two or more applications or two or more application configurations and delivers the same to the control unit. The control unit delivers a control signal to the application request unit according to the application reconfiguration command. The application request unit transmits an application or an application configuration request signal to a server according to the control signal of the control unit. The application receiving unit receives the application or the application configurations corresponding to a request signal from the server. The present invention is provided to enable a user to select functions of a necessary application and create a new application, thereby enabling the user to conveniently find a desired function. [Reference numerals] (AA) Wafer return;(BB) Boat load;(CC) Decompression;(DD,HH) Temperature rising;(EE) Stable temperature;(FF) SiCP deposition;(GG) Purge;(II) Annealing;(JJ) Temperature lowering;(KK) Atmospheric pressure;(LL) Boat unload;(MM) Wafer cooling;(NN) Wafer returning;(OO) In-situ Anneal, Annealing in a same device after deposition |
