发明名称 Structures for preventing cross-talk between through-silicon vias and integrated circuits
摘要 A semiconductor chip includes a through-silicon via (TSV), a device region, and a cross-talk prevention ring encircling one of the device region and the TSV. The TSV is isolated from substantially all device regions comprising active devices by the cross-talk prevention ring.
申请公布号 US8604594(B2) 申请公布日期 2013.12.10
申请号 US201213346995 申请日期 2012.01.10
申请人 KUO CHEN-CHENG;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 KUO CHEN-CHENG
分类号 H01L23/552 主分类号 H01L23/552
代理机构 代理人
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