发明名称 |
Piezoelectric ALN RF MEM switches monolithically integrated with ALN contour-mode resonators |
摘要 |
Piezoelectric switches and methods of forming piezoelectric switches. The piezoelectric switch includes first and second cantilever beam actuators. The second cantilever beam actuator has a projection that overlaps the first cantilever beam actuator in a contact region. The projection is mechanically separated from the first cantilever beam actuator by a nanogap such that the first and second cantilever beam actuators are electrically isolated from each other. Each of the first and second cantilever beam actuators includes a piezoelectric actuation layer. |
申请公布号 |
US8604670(B2) |
申请公布日期 |
2013.12.10 |
申请号 |
US20090994301 |
申请日期 |
2009.06.01 |
申请人 |
MAHAMEED RASHED;SINHA NIPUN;PIAZZA GIANLUCA;THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA |
发明人 |
MAHAMEED RASHED;SINHA NIPUN;PIAZZA GIANLUCA |
分类号 |
H01L41/09 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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