发明名称 METHOD AND SYSTEM FOR PUMP PRIMING
摘要 <p>The disclosure describes systems and methods relating generally to filtration. Even more particularly, embodiments described herein relate to optimizing operating routines of a pump based on filter. Embodiments of priming routines described herein can perform a back pressure step to pressurize the filter from downstream and a back flush step to flush the filter from downstream.</p>
申请公布号 KR20130133776(A) 申请公布日期 2013.12.09
申请号 KR20137012894 申请日期 2011.10.20
申请人 ENTEGRIS, INC. 发明人 BRAGGIN JENNIFER M.;INUI SHIHO;CHOW WAILUP;WU AIWEN
分类号 H01L21/02;H01L21/027 主分类号 H01L21/02
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