| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element reliability of which is enhanced by suppressing the peeling of a piezoelectric during continuous driving, even if the piezoelectric is deposited by sputtering, and to provide an ink jet head including the piezoelectric element.SOLUTION: A piezoelectric element 13 includes a piezoelectric 16a deposited on a diaphragm 15 by sputtering, a lower electrode 16c and an upper electrode 16b formed to sandwich the piezoelectric 16a in the thickness direction. A portion of the upper electrode 16b is formed on the piezoelectric 16a with an insulating film 18 interposed therebetween. The piezoelectric 16a is located directly under the insulating film 18, and has a first region R1 where the polarization direction during deposition by sputtering is maintained, and a second region R2 corresponding to the insulating film 18 non-forming region and having an inverted polarization direction. |
