发明名称 ELECTRON GUN
摘要 PROBLEM TO BE SOLVED: To form a proper electron beam by easily producing an electro gun cathode.SOLUTION: An electron gun cathode 104 is in the shape of a square pole and emits an electron when heated. The electron gun cathode 104 is inserted into a cylindrical recessed part 103a provided at a tip part of a truncated conical holding tool 103. A filler 120 is filled around the electron gun cathode 104 in the recessed part 103a, and the electron gun cathode 104 is held in the recessed part 103a.
申请公布号 JP2013246917(A) 申请公布日期 2013.12.09
申请号 JP20120118280 申请日期 2012.05.24
申请人 PARAM CO LTD 发明人 YASUDA HIROSHI
分类号 H01J37/075;H01J37/305;H01L21/027 主分类号 H01J37/075
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