| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure the temperature of a plate to be measured without requiring a wide space for installation or a complicated device configuration.SOLUTION: A temperature measuring device 1 for a plate W to be measured comprises a reference plate 8, first and second radiation thermometers 9 and 10, a correction coefficient determination means 12, and a temperature calculation means 13. The reference plate 8 is installed while being opposed to one side of the plate W to be measured and a temperature of the reference plate 8 is adjusted to be equal to that of the plate W to be measured. The first and second radiation thermometers 9 and 10 are installed to be oriented from angles which are different from each other, to a measuring point M on one side of the plate W to be measured and are capable of measuring a radiation temperature at the measuring point M, respectively. Based on output from the first radiation thermometer 9 and output from the second radiation thermometer 10, the correction coefficient determination means 12 determines a correction coefficient for correcting a temperature measurement error with shaking of the plate W to be measured. Based on the correction coefficient determined by the correction coefficient determination means 12, the temperature calculation means 13 corrects the output of the first radiation thermometer 9 and the second radiation thermometer 10 and calculates the temperature at the measuring point from corrected output. |
