| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-axis deflection electromagnetic drive type optical deflector for two-dimensionally scanning light such as a laser beam, which maintains necessary rigidity even in a case where the thickness of silicon of a gimbal frame part is made thin, attains a stable deflection operation and control operation and enables the downsizing of a device constitution.SOLUTION: Wire materials are wound for a plurality of times and over a plurality of layers around an air-core coil 9, and each wire material is configured to be bonded and fixed. The air-core coil 9 supports a gimbal frame 4 by attaching the air-core coil 9 to the gimbal frame 4. In a magnetic circuit, the tip parts of a pair of poles 6 and 7 forming a magnetic gap are positioned in a predetermined area corresponding to an outer peripheral frame 1, and support the outer peripheral frame. |
