| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor element capable of suppressing fluctuation in oscillation frequency of a pressure sensitive element by stress caused by being fixed to an external member.SOLUTION: There is provided a pressure sensor element 100, wherein a support part 10 includes a plurality of arm parts 12 and 14 which are provided to surround a pressure sensitive part 20, a first arm part 12 of the plurality of arm parts 12 and 14 has a shape to surround the whole periphery of the pressure sensitive part 20 connected to the pressure sensitive part 20 via a first connection part 11, the arm part 14 disposed at an outermost position of the plurality of arm parts 12 and 14 has a fixed part 16 and is connected to the first arm part 12 via a second connection part 13, and the first connection part 11 and the second connection part 13 are disposed to sandwich the pressure sensitive part 20. |
