METHOD FOR MANUFACTURING FLANGED TARGET

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a flanged target which can provide a favorable thin film and is excellent in durability.SOLUTION: A method is for manufacturing a flanged target provided with a flange at the circumference thereof so that the frontal surface of the target can be attached while facing the inner side of a device. The method includes: cold spray steps (S1 and S2) in which a target body having a prescribed component composition is prepared, metal particles heated in a solid phase temperature region are sprayed together with a gas stream to a back surface to be paired with a surface to be given a frontal surface of the target of the target body so that the metal particles are accumulated on the back surface while being plastically deformed to give a backing plate potion; and a mechanical machining step (S3) of forming the flange portion by machining.