发明名称 MOVABLE RANGE ADJUSTING MECHANISM FOR WORKPIECE CONVEYING DEVICE
摘要 PROBLEM TO BE SOLVED: To adjust a motion range of a workpiece conveying mechanism with a simple configuration.SOLUTION: A work conveying device includes a motion range adjusting mechanism for conveying workpieces of different sizes. The workpiece conveying device for conveying workpieces includes a workpiece holding mechanism configured to operate to hold and release the workpiece. The workpiece conveying device also includes an actuator equipped with a movable member directly or indirectly connected to the workpiece holding mechanism to drive the workpiece holding mechanism. The workpiece conveying device further includes a stopper device having a male member and a female member, and the male member and female member are configured to engage with each other in at least two different arrangements, thereby defining at least two predefined discontinuous holding positions of the workpiece holding mechanism connected to the movable member.
申请公布号 JP2013244579(A) 申请公布日期 2013.12.09
申请号 JP20120121515 申请日期 2012.05.29
申请人 EBARA CORP 发明人 NISHIDA HIROAKI
分类号 B25J15/08;H01L21/677 主分类号 B25J15/08
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