METHOD FOR MANUFACTURING CRUCIBLE FOR VAPOR DEPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a method for easily manufacturing a crucible coated with a carbon-containing film.SOLUTION: A film containing carbon covering the surface of an inner wall of a crucible can be formed using a phenomenon called carbonization in which an organic compound is thermally decomposed under a circumstance of low oxygen concentration. Specifically, a crucible for vapor deposition is heated under a reduced pressure where the pressure is controlled such that a temperature of sublimation of an organic compound and a temperature of thermal decomposition of an organic compound are coexistent to react the organic compound on the surface of the inner wall of the heated crucible for vapor deposition, carbon is generated on the surface of the inner wall of the crucible for vapor deposition by the reaction to form a film containing carbon on the surface of the inner wall of the crucible for vapor deposition.