ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK

摘要

An electrostatic chuck plate is connected on a base plate including a cooling device by an adhesive layer. The electrostatic chuck plate includes substrate setting surface in which non-processed substrate is set and an electrostatic electrode capable of absorbing the non-processed substrate, and a resistance heating element capable of heating the non-processed substrate. The electrostatic electrode and the resistance heating element are included in the electrostatic chuck plate. A control unit is arranged at the position according to the temperature distribution of the substrate setting surface at least one side among the upper surface of the base plate and the lower surface of the electrostatic chuck plate facing the upper surface through the adhesive layer. The control unit is charged by resin having heat conductivity according to the temperature distribution.