THREE DIMENSIONAL SHAPE MEASURING APPARATUS

摘要

Disclosed is a three-dimensional shape measuring device for obtaining pattern images with high accuracy. The three-dimensional shape measuring device can increase the accuracy when the height of a measured object according to positions is calculated from the pattern images, obtained by an image obtaining part, by generating grid-patterned light with which the measured object is irradiated close to sine waves using a grid unit in which multiple reversible saw-shaped unit grids are arranged at predetermined intervals in parallel. The present invention facilitates assembly and reduces manufacturing costs because an astigmatic lens is not necessary by forming the distance between a second angular point of a unit cell and a second angular point of the next unit cell greater than 0, but smaller than the limit of resolution which is the minimum distance to enable a condensing lens to distinguish two objects