| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus for resin containers, capable of forming films of equal quality on a plurality of the resin containers at once.SOLUTION: A coating apparatus 10 for resin containers includes: a chamber 40 serving as an external electrode, in which a plurality of the resin containers are stored; a plurality of internal electrodes 50 in which a gas leading part 51 for leading raw material gas is formed and which are inserted into the inside of a plurality of the resin containers B stored in the chamber 40, respectively; and a gas supply part 70 which supplies the raw material gas to the chamber 40. The gas supply part 70 includes a raw material gas supply channel P1 and a plurality of gas branch channels P2 which branch from the raw material gas supply channel P1 and communicate to the gas leading parts 51 of a plurality of the internal electrodes 50, respectively. A mass flow controller 74 for regulating flow rate of the raw material gas is set at the raw material gas supply channel P1, and flow rate regulating valves 78 for regulating the flow rate of the raw material gas are set at a plurality of the gas branch channels P2, respectively. |
