| 摘要 |
PROBLEM TO BE SOLVED: To efficiently and reliably eliminate a static current from a substrate to be conveyed.SOLUTION: A substrate static elimination system 1 comprises: a conveying mechanism 11 for conveying a located substrate; a charging sensor 12 for measuring a charging amount in a region of opposed substrates 10; a static eliminator 13 arranged nearer a downstream side in a conveying direction of the substrate 10 than the charging sensor 12 and emitting ions to the region of the opposed substrates 10; and a conveying speed controlling section 15 for controlling a conveying speed of the substrates 10 by the conveying mechanism 11 according to the charging amount measured by the charging sensor 12. |
