发明名称 MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a microscope capable of adjusting temperature of an objective optical system with high accuracy without bringing on enlargement of a device as a whole.SOLUTION: The microscope includes: a subject stage 102 for holding a subject 103; an objective optical system 104 for forming an image of the subject 103; a light receiving section for imaging the subject 103; and a driving section for moving the subject stage 102 to a second position which is different from a first position for imaging the subject 103. In this case, the subject stage 102 has a nozzle 301 for ejecting gas 304 and the nozzle 301 is arranged to have the gas 304 ejected from the nozzle 301 directed to the objective optical system 104 when the subject stage 102 is in the second position.
申请公布号 JP2013246191(A) 申请公布日期 2013.12.09
申请号 JP20120117483 申请日期 2012.05.23
申请人 CANON INC 发明人 FUJII HIROFUMI;YANAGISAWA MICHIO;SUDO YUJI
分类号 G02B21/00;G02B21/30 主分类号 G02B21/00
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