发明名称 MAGNETORESISTANCE EFFECT ELEMENT, MAGNETIC FIELD DETECTOR AND PHYSICAL QUANTITY DETECTOR
摘要 PROBLEM TO BE SOLVED: To provide a magnetoresistance effect element easy in manufacturing and having a large magnetoresistance effect.SOLUTION: A magnetoresistance effect element includes: a CoFeB film 2 formed above a substrate 20; an MgO film 3 formed on the CoFeB film 2; a Heusler alloy 4 which is formed above the MgO film 3 and is a free layer; a non-magnetic layer 5 formed on the Heusler alloy 4; and a fixed layer 41. The Heusler alloy comprises ABC or AB(CD) (0≤X≤1) represented by three or more kinds of elements.
申请公布号 JP2013247259(A) 申请公布日期 2013.12.09
申请号 JP20120120392 申请日期 2012.05.28
申请人 MITSUBISHI ELECTRIC CORP;TOHOKU UNIV 发明人 OSANAGA TAKASHI;TEZUKA NOBUKI
分类号 H01L43/08;G01R33/09;H01L43/10 主分类号 H01L43/08
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