发明名称 |
MAGNETORESISTANCE EFFECT ELEMENT, MAGNETIC FIELD DETECTOR AND PHYSICAL QUANTITY DETECTOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a magnetoresistance effect element easy in manufacturing and having a large magnetoresistance effect.SOLUTION: A magnetoresistance effect element includes: a CoFeB film 2 formed above a substrate 20; an MgO film 3 formed on the CoFeB film 2; a Heusler alloy 4 which is formed above the MgO film 3 and is a free layer; a non-magnetic layer 5 formed on the Heusler alloy 4; and a fixed layer 41. The Heusler alloy comprises ABC or AB(CD) (0≤X≤1) represented by three or more kinds of elements. |
申请公布号 |
JP2013247259(A) |
申请公布日期 |
2013.12.09 |
申请号 |
JP20120120392 |
申请日期 |
2012.05.28 |
申请人 |
MITSUBISHI ELECTRIC CORP;TOHOKU UNIV |
发明人 |
OSANAGA TAKASHI;TEZUKA NOBUKI |
分类号 |
H01L43/08;G01R33/09;H01L43/10 |
主分类号 |
H01L43/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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