摘要 |
A TFT(Thin Film Transistor) array substrate for an LCD(Liquid Crystal Display) and a method of manufacturing the TFT array substrate are provided to use a transparent carbon layer pattern as a passivation layer to reduce parasitic capacitance to thereby prevent signal distortion. A TFT array substrate includes gate lines arranged in parallel on an insulating substrate(104), a gate insulating layer(24) covering the gate lines, and first and second semiconductor patterns(26,28) formed on the gate insulating layer. The TFT array substrate further includes data lines intersecting the gate lines to define pixel regions, a source electrode(32), a drain electrode(34), a transparent carbon layer pattern(42), and a pixel electrode(54). The transparent carbon layer pattern has a contact hole(46) which exposes the drain electrode. The pixel electrode is formed on the transparent carbon layer pattern and electrically connected to the drain electrode through the contact hole. |