| 摘要 |
PURPOSE: A gate valve for a vacuum process is provided to control damages caused by shock and a leak caused by the damage and minimize the generation of particles. CONSTITUTION: A gate valve (100) for a vacuum process comprises a gate plate (101), a first cylinder (120), a fixed frame (110), a second cylinder (130), a sensor, and a controller. The gate plate covers the opening of a chamber. The first cylinder is connected to the gate plate and vertically moves the gate plate. The fixed frame movably supports the first cylinder. The second cylinder is supported to the fixed frame and horizontally moves the gate plate to open and close the opening of the chamber. The sensor senses the position of the gate plate. The controller controls the moving direction of the gate plate depending on the sensed results. |
