| 摘要 |
A plasma CVD apparatus has a vacuum chamber having a divided structure, and a shower plate can be easily attached to and detached from the vacuum chamber. A plasma CVD apparatus (3) has a vacuum chamber (10) having the divided structure composed of a connected body of first and second chamber blocks (11, 12). A shower plate (61) is taken out from the inner space by means of a taking out section (5) provided on the side surface (122) on the non-connected surface side of the second chamber block (12). Thus, the shower plate (61) can be easily attached to and detached from the inner space of the chamber (10) without making the shower plate (61) have the divided structure. |
