| 摘要 |
Disclosed is a defect inspection device that can highly accurately distinguish between true defects and noise/nuisance defects by means of integrating inspection results from different lighting conditions or detection conditions. Further disclosed is a method thereof. The defect inspection device—which is provided with: a lighting optical system that illuminates an inspected object under predetermined optical conditions; and a detection optical system that detects scattered light from the inspected object under predetermined detection conditions, and acquires image data—is characterized by being provided with: a defect candidate detection arbitrary unit that detects defect candidates from a plurality of image data acquired by the aforementioned detection optical system under differing optical conditions or image data acquisition conditions; and a post-inspection processing unit that integrates information about defect candidates detected from said plurality of image data, and differentiates defects from noise. |
