TRANSFER ERROR COMPENSATION METHOD OF DRIVING UNIT FOR PHASE SHIFTING

摘要

Disclosed is a method for compensating for a transfer error of a driving unit for phase shifting capable of calculating the transfer error of the driving unit and compensating for the error so as to move the phase of an interference fringe rapidly and correctly by using only the image on the interference fringe for each step captured by a camera. The method for compensating for the transfer error of the driving unit for phase shifting comprises: inputting, into the driving unit via a controller, a reference input value for operating the driving unit; moving the interference fringe at regular intervals step by step by operating the driving unit according to the reference input value, and concurrently capturing the image on the interference fringe for each step via the camera; the controller determining whether or not the transfer error of the interference fringe occurs by using brightness differences among the interference fringes for each step; and calculating the compensation value of the reference input value in the case that the controller determines that the transfer error of the interference fringe occurs. [Reference numerals] (AA) Start;(BB) End;(S110) Input a reference input value into the driving unit;(S120) Capturing an image on an interference fringe for each step via a camera;(S130) Whether or not does a transfer error of the interference fringe occur?;(S140) Calculate a compensation value of a reference input value