发明名称 SAME LAYER MICROELECTRONIC CIRCUIT PATTERNING USING HYBRID LASER PROJECTION PATTERNING (LPP) AND SEMI-ADDITIVE PATTERNING (SAP)
摘要 In some embodiments, same layer microelectronic circuit patterning using hybrid laser projection patterning (LPP) and semi-additive patterning (SAP) is presented. In this regard, a method is introduced including patterning a first density region of a laminated substrate surface using LPP, patterning a second density region of the laminated substrate surface using SAP, and plating the first and second density regions of the laminated substrate surface, wherein features spanning the first and second density regions are directly coupled. Other embodiments are also disclosed and claimed.
申请公布号 KR101336616(B1) 申请公布日期 2013.12.06
申请号 KR20117007695 申请日期 2009.10.09
申请人 发明人
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
代理机构 代理人
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