METHOD FOR MEASURING SURFACE SHAPE AND DEVICE FOR MEASURING SURFACE SHAPE

摘要

This method for measuring a surface shape comprises: a groove approximate range detection step (step STP2) for scanning the surface of an object and searching the acquired displacement data to detect the approximate range of the surface of an object that includes a groove machined into the surface of the object; a groove width calculation step (step STP3) for calculating a groove start point and groove end point of a groove included in the approximate range; a maximum depth position detection step for calculating the minimum value of displacement data limited to a range of width having a predetermined ratio of groove width from the center position of the groove start point and the groove end point; and a depth calculation step (step STP4) for calculating the difference between the minimum value the displacement data calculated in the maximum depth position detection step and the height of the surface of the object as the depth of the groove machined into the surface of an object.