| 摘要 |
<p>PURPOSE: A fine needle and a manufacturing method thereof are provided to economically manufacture a fine needle in the plane of a silicon substrate. CONSTITUTION: A fine needle comprises: a body portion(10) which is comprised of a silicon substrate and includes a reservoir(15) for storing fluid; and an extension part(20) which is comprised of a silicon substrate a silicon substrate, is integrally connected in one part of the body portion. A fine needle manufacturing method comprises: a step of providing a silicon substrate; a step of forming an etching mask in the substrate; a step of forming a microchannel and a pattern; a step of forming an extension part in the top and bottom of the substrate; a step of removing an etching mask; and a step of forming a cover on the microchannel or reservoir.</p> |
